Rotary/ Planar AZO Target
Product introduction
AZO target is a functional zinc aluminum oxide ceramic material, which is used for preparation of AZO transparent conductive thin film by magnetron sputtering. With plasma as the heat source, high purity and high density AZO target is produced from respective powders, which are heated to molten or semi-molten state and deposited on the surface of backing tube at high speeds to form dense coatings.
Applications
Thin film solar cell
Low-E glasses
Automotive coated glass
Product features
High-density target leads to high quality of film.
Sputtering power can be as high as 13 kW/m.
Sputtering rate and utilization efficiency are
higher than competitors’products.