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Rotary/ Planar AZO Target

Rotary/ Planar AZO Target


Product introduction

AZO target is a functional zinc aluminum oxide ceramic material, which is used for preparation of AZO transparent conductive thin film by magnetron sputtering. With plasma as the heat source, high purity and high density AZO target is produced from respective powders, which are heated to molten or semi-molten state and deposited on the surface of backing tube at high speeds to form dense coatings.


Applications

Thin film solar cell

Low-E glasses

Automotive coated glass


Product features

High-density target leads to high quality of film.

Sputtering power can be as high as 13 kW/m.

Sputtering rate and utilization efficiency are

higher than competitors’products.


Specifications

Chemical composition(wt%)ZnO:Al2O3=98:2
Purity(%)≥99.95
Density(g/cm3)≥5.1
Dimension

Target outer diameter Φ151-160mm

Stainless steel tube diameter OD133/ID125mm

Length ≤4m

According to the customized drawings.




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