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Rotary Si Target

Rotary Si Target


Product introduction

With plasma as the heat source, high purity and high density Si targets are produced from respective powders, which are heated to molten or semi-molten state and deposited on the surface of backing tube at high speeds to form dense coatings.


Applications

For deposition ofSiO2/Si3Nfilms, for optical glasses, AR films of touch panel screens, Low-E glasses, semiconductor devices and flat panel screens.


Specifications

Chemical composition(wt%)Si
Purity(%)≥99.99
Density(g/cm3)≥2.2
DimensionAccording to the customized drawings
Backing tube304/316L stainless steel (non-magnetic)




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