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Rotary SiZr Target

Rotary SiZr Target


Product introduction

With plasma as the heat source, high purity and high density SiZr targets are produced from respective powders, which are heated to molten or semi-molten state and deposited on the surface of backing tube at high speeds to form dense coatings.


Applications

Low-E glasses

Touch panel

Display

Thin Film PV


Specifications

Chemical composition(wt%)Si:Zr=58.5:36.5
Purity(%)≥99.9
Density(g/cm3)≥2.87
Electrical resistivity(Ω·cm)≤0.5

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