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ZrOx Target

ZrOx Target


Product introduction

With plasma as the heat source, high purity and high density ZrOx targets are produced from respective powders, which are heated to molten or semi-molten state and deposited on the surface of backing tube at high speeds to form dense coatings.


Applications

AR film of optical glasses

Low-E glasses

Tool and decorative coatings


Specifications

Chemical composition(wt%)ZrOx
Purity (%)≥99.9
Density(g/cm3)≥5.4
ImpuritiesAl≤100 Cr≤50 Ti≤100 Fe≤200
Total impurity≤1000
Electrical resistivity(Ω·cm)
≤0.5
Backing tube304/316L stainless steel(non-magnetic)
DimensionAccording to the customized drawings


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